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SEMI D3 — Quality Area Specification for Flat Panel Display Substrates
これらの用語は，主にFPDを製造するのに使用するフォトマスクに適用される。
Panel manufacturers’ basis for equipment comparison will become clear
本書はパイプラインを通して授受される水素ガスにのみ適用される。シリンダ充填ガスまたは液体状のガスには適用されない。
The scope of this study does not extend to recommendations as to which techniques may be less or more appropriate for particular manufacturing processes
C00336 - SEMI C3.36 - Standard for Hydrogen Chloride (HCl), 99.994% Quality (Provisional) Revision:SEMI C3.36-94 (Withdrawn 0701) - Withdrawn SEMI D3 — Quality AreaThis Standard was technically approved by the Gases Global Technical Committee. Available at www. semi. org in July 2001; originally published in 1989; previously published in 1994. NOTICE: This Document was balloted and approved for withdrawal in 2001. Hydrogen chloride is a colorless, pungent, corrosive gas having a suffocating odor. Hydrogen chloride is heavier than air and fumes strongly in moist air. It is very soluble in water and alcohol, and